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ELIMINATION OF POSTRELEASE ADHESION IN MICROSTRUCTURES USING CONFORMAL FLUOROCARBON COATINGS
Authors: MAN PF GOGOI BP MASTRANGELO CH
Citation: Pf. Man et al., ELIMINATION OF POSTRELEASE ADHESION IN MICROSTRUCTURES USING CONFORMAL FLUOROCARBON COATINGS, Journal of microelectromechanical systems, 6(1), 1997, pp. 25-34
ADHESION RELEASE AND YIELD ENHANCEMENT OF MICROSTRUCTURES USING PULSED LORENTZ FORCES
Authors: GOGOI BP MASTRANGELO CH
Citation: Bp. Gogoi et Ch. Mastrangelo, ADHESION RELEASE AND YIELD ENHANCEMENT OF MICROSTRUCTURES USING PULSED LORENTZ FORCES, Journal of microelectromechanical systems, 4(4), 1995, pp. 185-192
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