Authors: SHEN JM PALSULE C GANGOPADHYAY S NASEEM HA KIZZAR S GOH FHC

Citation: Jm. Shen et al., CHARACTERIZATION OF FLUORINATED HYDROGENATED AMORPHOUS-SILICON NITRIDE (A-SIN(X)H) ALLOYS, Journal of applied physics, 76(2), 1994, pp. 1055-1061