Citation: Wk. Schomburg et C. Goll, DESIGN OPTIMIZATION OF BISTABLE MICRODIAPHRAGM VALVES, Sensors and actuators. A, Physical, 64(3), 1998, pp. 259-264
Authors:
GOLL C
BACHER W
BUSTGENS B
MAAS D
RUPRECHT R
SCHOMBURG WK
Citation: C. Goll et al., AN ELECTROSTATICALLY ACTUATED POLYMER MICROVALVE EQUIPPED WITH A MOVABLE MEMBRANE-ELECTRODE, Journal of micromechanics and microengineering, 7(3), 1997, pp. 224-226