Authors: KOSTER T GONDEMANN J HADAM B SPANGENBERG B SCHUTZE M ROSKOS HG KURZ H BRUNNER J ABSTREITER G

Citation: T. Koster et al., OPTICAL-PROPERTIES OF REACTIVE-ION-ETCHED SI SI1-XGEX HETEROSTRUCTURES/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(2), 1996, pp. 698-706