Authors: LIANG S GORLA CR EMANETOGLU N LIU Y MAYO WE LU Y

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Authors: GORLA CR LIANG S TOMPA GS MAYO WE LU Y

Citation: Cr. Gorla et al., SILICON AND GERMANIUM NANOPARTICLE FORMATION IN AN INDUCTIVELY-COUPLED PLASMA REACTOR, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(3), 1997, pp. 860-864