AAAAAA
Results: 26-34/34
Authors:
KILGORE MD
WU HM
GRAVES DB
Citation: Md. Kilgore et al., NEUTRAL TRANSPORT IN HIGH PLASMA-DENSITY REACTORS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(1), 1994, pp. 494-506
Authors:
WU HM
GRAVES DB
PORTEOUS RK
LI M
Citation: Hm. Wu et al., BEHAVIOR OF AR PLASMA FORMED IN A HIGH-DENSITY PLASMA SOURCE - AN ECRREACTOR, Acta physica Sinica, 3(10), 1994, pp. 746-757
Authors:
WU HM
GRAVES DB
LI M
WANG Q
Citation: Hm. Wu et al., THE EFFECTS OF COIL CURRENT DISTRIBUTION IN A CYLINDRICAL ELECTRON-CYCLOTRON-RESONANCE REACTOR, Chinese Physics Letters, 11(12), 1994, pp. 747-750
Authors:
GRAVES DB
Citation: Db. Graves, PLASMA PROCESSING, IEEE transactions on plasma science, 22(1), 1994, pp. 31-42
Authors:
HARGIS PJ
GREENBERG KE
MILLER PA
GERARDO JB
TORCZYNSKI JR
RILEY ME
HEBNER GA
ROBERTS JR
OLTHOFF JK
WHETSTONE JR
VANBRUNT RJ
SOBOLEWSKI MA
ANDERSON HM
SPLICHAL MP
MOCK JL
BLETZINGER P
GARSCADDEN A
GOTTSCHO RA
SELWYN G
DALVIE M
HEIDENREICH JE
BUTTERBAUGH JW
BRAKE ML
PASSOW ML
PENDER J
LUJAN A
ELTA ME
GRAVES DB
SAWIN HH
KUSHNER MJ
VERDEYEN JT
HORWATH R
TURNER TR
Citation: Pj. Hargis et al., THE GASEOUS ELECTRONICS CONFERENCE RADIOFREQUENCY REFERENCE CELL - A DEFINED PARALLEL-PLATE RADIOFREQUENCY SYSTEM FOR EXPERIMENTAL AND THEORETICAL-STUDIES OF PLASMA-PROCESSING DISCHARGES, Review of scientific instruments, 65(1), 1994, pp. 140-154
Authors:
NITSCHKE TE
GRAVES DB
Citation: Te. Nitschke et Db. Graves, A COMPARISON OF PARTICLE-IN-CELL AND FLUID MODEL SIMULATIONS OF LOW-PRESSURE RADIO-FREQUENCY DISCHARGES, Journal of applied physics, 76(10), 1994, pp. 5646-5660
Authors:
LEE C
GRAVES DB
LIEBERMAN MA
HESS DW
Citation: C. Lee et al., GLOBAL-MODEL OF PLASMA CHEMISTRY IN A HIGH-DENSITY OXYGEN DISCHARGE, Journal of the Electrochemical Society, 141(6), 1994, pp. 1546-1555
Authors:
GRAVES DB
WU HM
PORTEOUS RK
Citation: Db. Graves et al., MODELING AND SIMULATION OF HIGH-DENSITY PLASMAS, JPN J A P 1, 32(6B), 1993, pp. 2999-3006
Authors:
KILGORE MD
DAUGHERTY JE
PORTEOUS RK
GRAVES DB
Citation: Md. Kilgore et al., ION DRAG ON AN ISOLATED PARTICULATE IN A LOW-PRESSURE DISCHARGE, Journal of applied physics, 73(11), 1993, pp. 7195-7202