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Results: 1
CONTROL OF ION ENERGY IN A CAPACITIVELY COUPLED REACTIVE ION ETCHER
Authors:
PARK HM GARVIN C GRIMARD DS GRIZZLE JW
Citation:
Hm. Park et al., CONTROL OF ION ENERGY IN A CAPACITIVELY COUPLED REACTIVE ION ETCHER, Journal of the Electrochemical Society, 145(12), 1998, pp. 4247-4252
Risultati:
1-1
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