Authors: SURENDRA M GUARNIERI CR SELWYN GS DALVIE M

Citation: M. Surendra et al., ACROSS WAFER ETCH RATE UNIFORMITY IN A HIGH-DENSITY PLASMA REACTOR - EXPERIMENT AND MODELING, Applied physics letters, 66(18), 1995, pp. 2415-2417

Authors: DALVIE M SELWYN GS SURENDRA M GUARNIERI CR MCGILL JJ

Citation: M. Dalvie et al., DETECTION OF PARTICLE TRAPS BY SPATIALLY-RESOLVED OPTICAL-EMISSION SPECTROSCOPY OVER GROOVED ELECTRODES IN RADIO-FREQUENCY DISCHARGES, Applied physics letters, 63(24), 1993, pp. 3279-3281