Authors: ZHANG M WANG LW GAO JX LIN CL HEMMENT PLF GUTJAHR K GOSELE U

Citation: M. Zhang et al., GETTERING OF CU BY HE-INDUCED CAVITIES IN SIMOX MATERIALS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 134(3-4), 1998, pp. 360-364

Authors: ZHANG M LIN CL HEMMENT PLF GUTJAHR K GOSELE U

Citation: M. Zhang et al., STUDY OF CU GETTERING TO CAVITIES IN SEPARATION BY IMPLANTATION OF OXYGEN SUBSTRATES, Applied physics letters, 72(7), 1998, pp. 830-832

Authors: TONG QY GUTJAHR K HOPFE S GOSELE U LEE TH

Citation: Qy. Tong et al., LAYER SPLITTING PROCESS IN HYDROGEN-IMPLANTED SI, GE, SIC, AND DIAMOND SUBSTRATES, Applied physics letters, 70(11), 1997, pp. 1390-1392