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Results: 1
Determination of the possible magnitude of the charging effect in a SCALPEL mask membrane
Authors:
Mkrtchyan, MM Gasparyan, AS Mkhoyan, KA Liddle, JA Novembre, AE
Citation:
Mm. Mkrtchyan et al., Determination of the possible magnitude of the charging effect in a SCALPEL mask membrane, J VAC SCI B, 17(6), 1999, pp. 2888-2892
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