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Results: 4
Thinfilm technologies to fabricate a linear microactuator
Authors:
Fohse, M Kohlmeier, T Gatzen, HH
Citation:
M. Fohse et al., Thinfilm technologies to fabricate a linear microactuator, SENS ACTU-A, 91(1-2), 2001, pp. 145-149
Rigid disk slider micromachining challenges to meet microtribology needs
Authors:
Gatzen, HH
Citation:
Hh. Gatzen, Rigid disk slider micromachining challenges to meet microtribology needs, TRIBOL INT, 33(5-6), 2000, pp. 337-342
Micro electro-mechanical systems (MEMS) in precision engineering
Authors:
Gatzen, HH
Citation:
Hh. Gatzen, Micro electro-mechanical systems (MEMS) in precision engineering, TEC MES, 66(12), 1999, pp. 476-484
Slicing induced ABS-cambering in thin film pico sliders
Authors:
Gatzen, HH Morsbach, C Siekmann, H Zeadan, J
Citation:
Hh. Gatzen et al., Slicing induced ABS-cambering in thin film pico sliders, IEEE MAGNET, 35(5), 1999, pp. 2427-2429
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