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Citation: H. Wickland et al., Integration of chemical vapor deposition Al interconnects in a benzocyclobutene low dielectric constant polymer matrix: A feasibility study, J VAC SCI B, 18(5), 2000, pp. 2463-2471

Authors: Talevi, R Gundlach, H Bian, ZL Knorr, A van Gestel, M Padiyar, S Kaloyeros, AE Geer, RE Shaffer, EO Martin, S

Citation: R. Talevi et al., Material and process studies in the integration of plasma-promoted chemical-vapor deposition of aluminum with benzocyclobutene low-dielectric constant polymer, J VAC SCI B, 18(1), 2000, pp. 252-261

Authors: Shashidhar, R Geer, RE

Citation: R. Shashidhar et Re. Geer, Surface-induced undulations in a liquid crystalline polymer, INT J ENG S, 38(9-10), 2000, pp. 1049-1056