Authors: Landsberger, LM Ghayour, R Sayedi, M Kahrizi, M Landheer, D Bardwell, JA Riopel, Y Jean, C Logiudice, V

Citation: Lm. Landsberger et al., Electrical characterization of metal-oxide-semiconductor capacitors with anodic and plasma-nitrided oxides, J VAC SCI A, 18(2), 2000, pp. 676-680