Authors:
Antoniou, N
Thompson, M
Salen, J
Casey, D
Goruganthu, RR
Ring, R
Birdsley, J
Gilfeather, G
Citation: N. Antoniou et al., Control of localized access to circuitry through the backside using focused ion beam technology, J VAC SCI B, 17(6), 1999, pp. 2730-2733