Login
|
New Account
AAAAAA
ITA
ENG
Results:
1-2
|
Results: 2
Effects of annealing on X-ray-amorphous CVD W-Si-N barrier layer materials
Authors:
Gokce, OH Amin, S Ravindra, NM Szostak, DJ Paff, RJ Fleming, JG Galewski, CJ Shallenberger, J Eby, R
Citation:
Oh. Gokce et al., Effects of annealing on X-ray-amorphous CVD W-Si-N barrier layer materials, THIN SOL FI, 353(1-2), 1999, pp. 149-156
Special section on transient thermal processing of electronic materials - Foreword
Authors:
Ravindra, NM Gokce, OH Sopori, BL
Citation:
Nm. Ravindra et al., Special section on transient thermal processing of electronic materials - Foreword, J ELEC MAT, 27(12), 1998, pp. 1277-1277
Risultati:
1-2
|