Authors: Ueda, M Berni, LA Rossi, JO Barroso, JJ Gomes, GF Beloto, AF Abramof, E

Citation: M. Ueda et al., Plasma immersion ion implantation experiments at the Instituto Nacional dePesquisas Espaciais (INPE), Brazil, SURF COAT, 136(1-3), 2001, pp. 28-31

Authors: Abramof, E Beloto, AF Ueda, M Gomes, GF Berni, LA Reuther, H

Citation: E. Abramof et al., Analysis of X-ray rocking curves in (001) silicon crystals implanted with nitrogen by plasma immersion ion implantation, NUCL INST B, 161, 2000, pp. 1054-1057

Authors: Ueda, M Gomes, GF Berni, LA Rossi, JO Barroso, JJ Beloto, AF Abramof, E Reuther, H

Citation: M. Ueda et al., Plasma immersion ion implantation using a glow discharge source with controlled plasma potential, NUCL INST B, 161, 2000, pp. 1064-1068

Authors: Berni, LA Ueda, M Gomes, GF Beloto, AF Reuther, H

Citation: La. Berni et al., Experimental results of a dc glow discharge source with controlled plasma floating potential for plasma immersion ion implantation, J PHYS D, 33(13), 2000, pp. 1592-1595

Authors: Beloto, AF Abramof, E Ueda, M Berni, LA Gomes, GF

Citation: Af. Beloto et al., Plasma ion implantation of nitrogen into silicon: High resolution x-ray diffraction, BRAZ J PHYS, 29(4), 1999, pp. 768-770

Authors: Ueda, M Berni, LA Gomes, GF Beloto, AF Abramof, E Reuther, H

Citation: M. Ueda et al., Application of a dc glow discharge source with controlled plasma potentialin plasma immersion ion implantation, J APPL PHYS, 86(9), 1999, pp. 4821-4824