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Results: 1-2 |
Results: 2
Electron and hole trapping in thermal oxides that have been ion implanted
Authors: Mrstik, BJ Hughes, HL McMarr, PJ Gouker, P
Citation: Bj. Mrstik et al., Electron and hole trapping in thermal oxides that have been ion implanted, MICROEL ENG, 59(1-4), 2001, pp. 285-289
Sub-100 nm silicon on insulator complimentary metal-oxide semiconductor transistors by deep ultraviolet optical lithography
Authors: Fritze, M Burns, J Wyatt, PW Chen, CK Gouker, P Chen, CL Keast, C Astolfi, D Yost, D Preble, D Curtis, A Davis, P Cann, S Deneault, S Liu, HY
Citation: M. Fritze et al., Sub-100 nm silicon on insulator complimentary metal-oxide semiconductor transistors by deep ultraviolet optical lithography, J VAC SCI B, 18(6), 2000, pp. 2886-2890
Risultati: 1-2 |