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Results:
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Results: 2
In situ substrate temperature measurements during radio frequency sputtering of ZnO thin film using fiber Bragg grating
Authors:
Zayer, NK Henderson, PJ Grellier, AJC Pannell, CN
Citation:
Nk. Zayer et al., In situ substrate temperature measurements during radio frequency sputtering of ZnO thin film using fiber Bragg grating, J VAC SCI A, 17(3), 1999, pp. 871-876
In situ monitoring of sputtered zinc oxide films for piezoelectric transducers
Authors:
Zayer, NK Greef, R Rogers, K Grellier, AJC Pannell, CN
Citation:
Nk. Zayer et al., In situ monitoring of sputtered zinc oxide films for piezoelectric transducers, THIN SOL FI, 352(1-2), 1999, pp. 179-184
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