Authors:
Liberman, V
Rothschild, M
Sedlacek, JHC
Uttaro, RS
Grenville, A
Bates, AK
Van Peski, C
Citation: V. Liberman et al., Excimer-laser-induced degradation of fused silica and calcium fluoride for193-nm lithographic applications, OPTICS LETT, 24(1), 1999, pp. 58-60
Authors:
Liberman, V
Rothschild, M
Sedlacek, JHC
Uttaro, RS
Grenville, A
Citation: V. Liberman et al., Excimer-laser-induced densification of fused silica: laser-fluence and material-grade effects on the scaling law, J NON-CRYST, 244(2-3), 1999, pp. 159-171