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Results: 1
The oxidation of surface layers during reactive ion etching of GaAs in CF2Cl2+O-2 and O-2 plasmas
Authors:
Grigonis, A Galdikas, A Silinskas, M
Citation:
A. Grigonis et al., The oxidation of surface layers during reactive ion etching of GaAs in CF2Cl2+O-2 and O-2 plasmas, APPL SURF S, 139, 1999, pp. 581-586
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