Authors:
Badenes, G
Rooyackers, R
Augendre, E
Vandamme, E
Perello, C
Heylen, N
Grillaert, J
Deferm, L
Citation: G. Badenes et al., A new dummy-free shallow trench isolation concept for mixed-signal applications, J ELCHEM SO, 147(10), 2000, pp. 3827-3832
Authors:
Zhong, L
Yang, J
Holland, K
Grillaert, J
Devriend, K
Heylen, N
Meuris, M
Citation: L. Zhong et al., A static model for scratches generated during aluminum chemical-mechanicalpolishing process: Orbital technology, JPN J A P 1, 38(4A), 1999, pp. 1932-1938