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Results:
1-2
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Results: 2
Authors:
Elam, JW
Nelson, CE
Grubbs, RK
George, SM
Citation: Jw. Elam et al., Nucleation and growth during tungsten atomic layer deposition on SiO2 surfaces, THIN SOL FI, 386(1), 2001, pp. 41-52
Authors:
Elam, JW
Nelson, CE
Grubbs, RK
George, SM
Citation: Jw. Elam et al., Kinetics of the WF6 and Si2H6 surface reactions during tungsten atomic layer deposition, SURF SCI, 479(1-3), 2001, pp. 121-135
Risultati:
1-2
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