Authors: Stark, T Gutowski, L Herden, M Grunleitner, H Kohler, S Hundhausen, M Ley, L

Citation: T. Stark et al., Ti-silicide formation during isochronal annealing followed by in situ ellipsometry, MICROEL ENG, 55(1-4), 2001, pp. 101-107

Authors: Grunleitner, H Semmelroth, K Schulz, M

Citation: H. Grunleitner et al., Resistivity of ultrathin (0.6-3.7 nm) IrSi films on Si(100), PHYS ST S-A, 185(2), 2001, pp. 429-439

Authors: Stark, T Grunleitner, H Hundhausen, M Ley, L

Citation: T. Stark et al., Deriving the kinetic parameters for Pt-silicide formation from temperatureramped in situ ellipsometric measurements, THIN SOL FI, 358(1-2), 2000, pp. 73-79