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Results:
1-3
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Results: 3
Ti-silicide formation during isochronal annealing followed by in situ ellipsometry
Authors:
Stark, T Gutowski, L Herden, M Grunleitner, H Kohler, S Hundhausen, M Ley, L
Citation:
T. Stark et al., Ti-silicide formation during isochronal annealing followed by in situ ellipsometry, MICROEL ENG, 55(1-4), 2001, pp. 101-107
Resistivity of ultrathin (0.6-3.7 nm) IrSi films on Si(100)
Authors:
Grunleitner, H Semmelroth, K Schulz, M
Citation:
H. Grunleitner et al., Resistivity of ultrathin (0.6-3.7 nm) IrSi films on Si(100), PHYS ST S-A, 185(2), 2001, pp. 429-439
Deriving the kinetic parameters for Pt-silicide formation from temperatureramped in situ ellipsometric measurements
Authors:
Stark, T Grunleitner, H Hundhausen, M Ley, L
Citation:
T. Stark et al., Deriving the kinetic parameters for Pt-silicide formation from temperatureramped in situ ellipsometric measurements, THIN SOL FI, 358(1-2), 2000, pp. 73-79
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