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Results:
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Results: 1
Ti-silicide formation during isochronal annealing followed by in situ ellipsometry
Authors:
Stark, T Gutowski, L Herden, M Grunleitner, H Kohler, S Hundhausen, M Ley, L
Citation:
T. Stark et al., Ti-silicide formation during isochronal annealing followed by in situ ellipsometry, MICROEL ENG, 55(1-4), 2001, pp. 101-107
Risultati:
1-1
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