Authors: HAMERS EAG VANSARK WGJHM BEZEMER J GOEDHEER WJ VANDERWEG WF

Citation: Eag. Hamers et al., ON THE TRANSMISSION FUNCTION OF AN ION-ENERGY AND MASS-SPECTROMETER, International journal of mass spectrometry and ion processes, 173(1-2), 1998, pp. 91-98

Authors: HAMERS EAG VANSARK WGJHM BEZEMER J MEILING H VANDERWEG WF

Citation: Eag. Hamers et al., STRUCTURAL-PROPERTIES OF A-SI-H RELATED TO ION ENERGY-DISTRIBUTIONS IN VHF SILANE DEPOSITION PLASMAS, Journal of non-crystalline solids, 226(3), 1998, pp. 205-216

Authors: VANSARK WGJHM MEILING H HAMERS EAG BEZEMER J VANDERWEG WF

Citation: Wgjhm. Vansark et al., SHEATH THICKNESS IN VERY-HIGH-FREQUENCY PLASMA CHEMICAL-VAPOR-DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(3), 1997, pp. 654-658

Authors: NIENHUIS GJ GOEDHEER WJ HAMERS EAG VANSARK WGJHM BEZEMER J

Citation: Gj. Nienhuis et al., A SELF-CONSISTENT FLUID MODEL FOR RADIOFREQUENCY DISCHARGES IN SIH4-H-2 COMPARED TO EXPERIMENTS, Journal of applied physics, 82(5), 1997, pp. 2060-2071