Authors: WOODWORTH JR NICHOLS CA HAMILTON TW

Citation: Jr. Woodworth et al., POSITIVE-ION SPECIES IN HIGH-DENSITY DISCHARGES CONTAINING CHLORINE AND BORON-TRICHLORIDE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(6), 1998, pp. 3235-3239

Authors: NICHOLS CA WOODWORTH JR HAMILTON TW

Citation: Ca. Nichols et al., ION ENERGY-DISTRIBUTION FUNCTIONS IN INDUCTIVELY-COUPLED RADIOFREQUENCY DISCHARGES - MIXTURES OF CL-2 BCL3/AR/, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(6), 1998, pp. 3389-3395

Authors: WOODWORTH JR RILEY ME MILLER PA NICHOLS CA HAMILTON TW

Citation: Jr. Woodworth et al., ION DISTRIBUTION-FUNCTIONS IN INDUCTIVELY-COUPLED RADIO-FREQUENCY DISCHARGES IN ARGON-CHLORINE MIXTURES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(6), 1997, pp. 3015-3023

Authors: WOODWORTH JR RILEY ME MILLER PA HEBNER GA HAMILTON TW

Citation: Jr. Woodworth et al., ION ENERGY AND ANGULAR-DISTRIBUTIONS IN INDUCTIVELY DRIVEN RADIO-FREQUENCY DISCHARGES IN CHLORINE, Journal of applied physics, 81(9), 1997, pp. 5950-5959

Authors: WOODWORTH JR ARAGON BP HAMILTON TW

Citation: Jr. Woodworth et al., EFFECT OF BUMPS ON THE WAFER ON ION DISTRIBUTION-FUNCTIONS IN HIGH-DENSITY ARGON AND ARGON-CHLORINE DISCHARGES, Applied physics letters, 70(15), 1997, pp. 1947-1949