Authors: HANYALOGLU BF AYDIL ES

Citation: Bf. Hanyaloglu et Es. Aydil, BOW TEMPERATURE PLASMA DEPOSITION OF SILICON-NITRIDE FROM SILANE AND NITROGEN PLASMAS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(5), 1998, pp. 2794-2803

Authors: HANYALOGLU BF GRAHAM EE ORESKOVIC T HAJJ CG

Citation: Bf. Hanyaloglu et al., VAPOR-PHASE LUBRICATION OF HIGH-TEMPERATURE ALLOYS, Lubrication engineering, 51(6), 1995, pp. 503-508