Authors:
RICHARDSON M
SILFVAST WT
BENDER HA
HANZO A
YANOVSKY VP
JIN F
THORPE J
Citation: M. Richardson et al., CHARACTERIZATION AND CONTROL OF LASER-PLASMA FLUX PARAMETERS FOR SOFT-X-RAY PROJECTION LITHOGRAPHY, Applied optics, 32(34), 1993, pp. 6901-6910