Authors: HARGIS PJ GREENBERG KE MILLER PA GERARDO JB TORCZYNSKI JR RILEY ME HEBNER GA ROBERTS JR OLTHOFF JK WHETSTONE JR VANBRUNT RJ SOBOLEWSKI MA ANDERSON HM SPLICHAL MP MOCK JL BLETZINGER P GARSCADDEN A GOTTSCHO RA SELWYN G DALVIE M HEIDENREICH JE BUTTERBAUGH JW BRAKE ML PASSOW ML PENDER J LUJAN A ELTA ME GRAVES DB SAWIN HH KUSHNER MJ VERDEYEN JT HORWATH R TURNER TR

Citation: Pj. Hargis et al., THE GASEOUS ELECTRONICS CONFERENCE RADIOFREQUENCY REFERENCE CELL - A DEFINED PARALLEL-PLATE RADIOFREQUENCY SYSTEM FOR EXPERIMENTAL AND THEORETICAL-STUDIES OF PLASMA-PROCESSING DISCHARGES, Review of scientific instruments, 65(1), 1994, pp. 140-154