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CONTACTLESS CHARACTERIZATION OF THERMALLY OXIDIZED, AIR-EXPOSED AND HYDROGEN-TERMINATED SILICON SURFACES BY CAPACITANCE-VOLTAGE AND PHOTOLUMINESCENCE METHODS
Authors: KOYANAGI S HASHIZME T HASEGAWA H
Citation: S. Koyanagi et al., CONTACTLESS CHARACTERIZATION OF THERMALLY OXIDIZED, AIR-EXPOSED AND HYDROGEN-TERMINATED SILICON SURFACES BY CAPACITANCE-VOLTAGE AND PHOTOLUMINESCENCE METHODS, JPN J A P 1, 35(2B), 1996, pp. 946-953
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