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Results: 1
CHARACTERIZATION OF A PECVD WXN PROCESS USING N-2, H-2, AND WF6
Authors:
LAI KK MAK AW WENDLING TPHF JIAN P HATHCOCK B
Citation:
Kk. Lai et al., CHARACTERIZATION OF A PECVD WXN PROCESS USING N-2, H-2, AND WF6, Thin solid films, 332(1-2), 1998, pp. 329-334
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