Authors: TOBIN PJ OKADA Y AJURIA SA LAKHOTIA V FEIL WA HEDGE RI

Citation: Pj. Tobin et al., FURNACE FORMATION OF SILICON OXYNITRIDE THIN DIELECTRICS IN NITROUS-OXIDE (N2O) - THE ROLE OF NITRIC-OXIDE (NO), Journal of applied physics, 75(3), 1994, pp. 1811-1817