Authors: MUNSON CP FAEHL RJ HENINS F NASTASI M REASS WA REJ DJ SCHEUER JT WALTER KC WOOD BP

Citation: Cp. Munson et al., RECENT ADVANCES IN PLASMA SOURCE ION-IMPLANTATION AT LOS-ALAMOS NATIONAL LABORATORY, Surface & coatings technology, 84(1-3), 1996, pp. 528-536