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THE EFFECTS OF THE PROCESS PARAMETERS ON THE ELECTRICAL AND MICROSTRUCTURE CHARACTERISTICS OF THE CRSI THIN RESISTOR FILMS - PART I
Authors: WU F MCLAURIN AW HENSON KE MANAGHAN DG THOMASSON SL
Citation: F. Wu et al., THE EFFECTS OF THE PROCESS PARAMETERS ON THE ELECTRICAL AND MICROSTRUCTURE CHARACTERISTICS OF THE CRSI THIN RESISTOR FILMS - PART I, Thin solid films, 332(1-2), 1998, pp. 418-422
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