Authors: WASSON JR TORRES JL RAMPERSAD HR WOLFE JC RUCHHOEFT P HERBORDT M LOSCHNER H

Citation: Jr. Wasson et al., ION ABSORBING STENCIL MASK COATINGS FOR ION-BEAM LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2214-2217