Authors: HINES JH MALOCHA DC SUNDARAM KB CASEY KJ LEE KR

Citation: Jh. Hines et al., DEPOSITION PARAMETER STUDIES AND SURFACE-ACOUSTIC-WAVE CHARACTERIZATION OF PECVD SILICON-NITRIDE FILMS ON LITHIUM-NIOBATE, IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 42(3), 1995, pp. 397-403