Authors: RAMANATH G CARLSSON JRA GREENE JE ALLEN LH HORNBACK VC ALLMAN DJ

Citation: G. Ramanath et al., GAS-PHASE TRANSPORT OF WF6 THROUGH ANNULAR NANOPIPES IN TIN DURING CHEMICAL-VAPOR-DEPOSITION OF W ON TIN TI/SIO2 STRUCTURES FOR INTEGRATED-CIRCUIT FABRICATION/, Applied physics letters, 69(21), 1996, pp. 3179-3181