Authors: CALLEGARI A POMERENE AT HOVEL HJ BABICH ED PURUSHOTHAMAN S SHAW JM

Citation: A. Callegari et al., OPTICAL-PROPERTIES OF HYDROGENATED AMORPHOUS-CARBON FILM FOR ATTENUATED PHASE-SHIFT MASK APPLICATIONS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2697-2699