Authors: MOTAMEDI ME PARK S WANG AH DADKHAH MS ANDREWS AP MARCY HO KHOSHNEVISAN M CHIOU AE HUHN RJ SELL CF SMITS JG

Citation: Me. Motamedi et al., DEVELOPMENT OF MICROELECTROMECHANICAL OPTICAL SCANNER, Optical engineering, 36(5), 1997, pp. 1346-1353