Authors:
Akiyama, T
Staufer, U
de Rooij, NF
Lange, D
Hagleitner, C
Brand, O
Baltes, H
Tonin, A
Hidber, HR
Citation: T. Akiyama et al., Integrated atomic force microscopy array probe with metal-oxide-semiconductor field effect transistor stress sensor, thermal bimorph actuator, and on-chip complementary metal-oxide-semiconductor electronics, J VAC SCI B, 18(6), 2000, pp. 2669-2675