Authors:
Holloway, BC
Kraft, O
Shuh, DK
Nix, WD
Kelly, M
Pianetta, P
Hagstrom, S
Citation: Bc. Holloway et al., Role of delocalized nitrogen in determining the local atomic arrangement and mechanical properties of amorphous carbon nitride thin films, J VAC SCI A, 18(6), 2000, pp. 2964-2971