Authors:
Temple-Boyer, P
Launay, J
Hajji, B
Sarrabayrouse, G
Martinez, A
Citation: P. Temple-boyer et al., Study of capacitive structures for amplifying the sensitivity of FET-basedchemical sensors, SENS ACTU-B, 78(1-3), 2001, pp. 285-290
Authors:
Temple-Boyer, P
Hajji, B
Alay, JL
Morante, JR
Martinez, A
Citation: P. Temple-boyer et al., Properties of SiOxNy films deposited by LPCVD from SiH4/N2O/NH3 gaseous mixture, SENS ACTU-A, 74(1-3), 1999, pp. 52-55
Authors:
Hajji, B
Temple-Boyer, P
Olivie, F
Martinez, A
Citation: B. Hajji et al., Electrical characterisation of thin silicon oxynitride films deposited by low pressure chemical vapour deposition, THIN SOL FI, 354(1-2), 1999, pp. 9-12