Authors:
Hallil, A
Zabeida, O
Wertheimer, MR
Martinu, L
Citation: A. Hallil et al., Mass-resolved ion energy distributions in continuous dual mode microwave/radio frequency plasmas in argon and nitrogen, J VAC SCI A, 18(3), 2000, pp. 882-890
Citation: A. Hallil et B. Despax, Internal r.f. plasma parameters correlated with structure and properties of deposited hydrocarbon films, THIN SOL FI, 358(1-2), 2000, pp. 30-39
Authors:
Zabeida, O
Hallil, A
Wertheimer, MR
Martinu, L
Citation: O. Zabeida et al., Time-resolved measurements of ion energy distributions in dual-mode pulsed-microwave/radio frequency plasma, J APPL PHYS, 88(2), 2000, pp. 635-642