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Lu, ZG
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Arunachalam, S
Fernau, M
Hansen, DA
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Authors:
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Hsu, Y
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Sun, HJ
Hansen, DA
King, J
Fury, MA
Citation: P. Wrschka et al., Polishing parameter dependencies and surface oxidation of chemical mechanical polishing of Al thin films, J ELCHEM SO, 146(7), 1999, pp. 2689-2696
Authors:
Hernandez, J
Wrschka, P
Hsu, Y
Kuan, TS
Oehrlein, GS
Sun, HJ
Hansen, DA
King, J
Fury, MA
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