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Results: 4
Liquid-jet laser-plasma X-ray sources for microscopy and lithography
Authors:
Hertz, HM Berglund, M Hansson, BAM Hemberg, O Johansson, GJ
Citation:
Hm. Hertz et al., Liquid-jet laser-plasma X-ray sources for microscopy and lithography, J PHYS IV, 11(PR2), 2001, pp. 389-396
A liquid-xenon-jet laser-plasma X-ray and EUV source
Authors:
Hansson, BAM Rymell, L Berglund, M Hertz, HM
Citation:
Bam. Hansson et al., A liquid-xenon-jet laser-plasma X-ray and EUV source, MICROEL ENG, 53(1-4), 2000, pp. 667-670
Simulation of interference patterns in solid-state biprism devices
Authors:
Hansson, BAM Machida, N Furuya, K Wernersson, LE Samuelson, L
Citation:
Bam. Hansson et al., Simulation of interference patterns in solid-state biprism devices, SOL ST ELEC, 44(7), 2000, pp. 1275-1280
Stability of droplet-target laser-plasma soft x-ray sources
Authors:
Hemberg, O Hansson, BAM Berglund, M Hertz, HM
Citation:
O. Hemberg et al., Stability of droplet-target laser-plasma soft x-ray sources, J APPL PHYS, 88(9), 2000, pp. 5421-5425
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