Authors: Hastings, JT Zhang, F Finlayson, MA Goodberlet, JG Smith, HI

Citation: Jt. Hastings et al., Two-dimensional spatial-phase-locked electron-beam lithography via sparse sampling, J VAC SCI B, 18(6), 2000, pp. 3268-3271

Authors: Hastings, JT Zhang, F Goodberlet, JG Smith, H

Citation: Jt. Hastings et al., Improved pattern-placement accuracy in E-beam lithography via sparse-sample spatial-phase locking, MICROEL ENG, 53(1-4), 2000, pp. 361-364