Authors:
Anguita, JV
Silva, SRP
Burden, AP
Sealy, BJ
Haq, S
Hebbron, M
Sturland, I
Pritchard, A
Citation: Jv. Anguita et al., Thermal stability of plasma deposited thin films of hydrogenated carbon-nitrogen alloys, J APPL PHYS, 86(11), 1999, pp. 6276-6281