Authors: Akiyama, T Gautsch, S de Rooij, NF Staufer, U Niedermann, P Howald, L Muller, D Tonin, A Hidber, HR Pike, WT Hecht, MH

Citation: T. Akiyama et al., Atomic force microscope for planetary applications, SENS ACTU-A, 91(3), 2001, pp. 321-325

Authors: Akiyama, T Staufer, U de Rooij, NF Lange, D Hagleitner, C Brand, O Baltes, H Tonin, A Hidber, HR

Citation: T. Akiyama et al., Integrated atomic force microscopy array probe with metal-oxide-semiconductor field effect transistor stress sensor, thermal bimorph actuator, and on-chip complementary metal-oxide-semiconductor electronics, J VAC SCI B, 18(6), 2000, pp. 2669-2675