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Results: 3

Authors: Thomas, L Ducarroir, M Hillel, R Berjoan, R
Citation: L. Thomas et al., Ion bombardment and temperature effects on the microstructure of RF plasmachemical vapor-deposited SiC : H, SURF COAT, 142, 2001, pp. 829-834

Authors: Bendeddouche, A Berjoan, R Beche, E Hillel, R
Citation: A. Bendeddouche et al., Hardness and stiffness of amorphous SiCxNy chemical vapor deposited coatings, SURF COAT, 111(2-3), 1999, pp. 184-190

Authors: Llauro, G Hillel, R Sibieude, F
Citation: G. Llauro et al., Elaboration and properties of CVD Ti-N-Si coatings, CHEM VAPOR, 4(6), 1998, pp. 247-252
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