Authors:
Vuong, HH
Gossmann, HJ
Pelaz, L
Celler, GK
Jacobson, DC
Barr, D
Hergenrother, J
Monroe, D
Venezia, VC
Rafferty, CS
Hillenius, SJ
McKinley, J
Stevie, FA
Granger, C
Citation: Hh. Vuong et al., Boron pileup and clustering in silicon-on-insulator films, APPL PHYS L, 75(8), 1999, pp. 1083-1085